ThermoAir 5.0+ Inconel and NANOZ gas sensors for wafer fabs, ATMP facilities, and cleanroom environments. As India invests ₹1.6 Lakh Crore in semiconductor manufacturing, ensure your fab runs with Swiss precision – ±0.5% of reading accuracy.
10 approved projects with ₹1.6 Lakh Crore investments across 6 states – creating massive demand for precision manufacturing sensors
Key fab and ATMP facilities – all requiring precision flow and gas sensors
Class 1 cleanrooms and aggressive chemistries demand the highest sensor quality
Our ThermoAir 5.0+ sensors are specifically engineered for semiconductor cleanroom environments. With Inconel housing, ultra-low outgassing, and particle-free design, they meet the stringent requirements of Class 1-10,000 cleanrooms.
The NANOZ MEMS MOX sensors enable ppb-level gas detection for process gases, leak detection, and exhaust monitoring – critical for 28 nm and below nodes where contamination control is paramount.
Personal gas detection for fab workers exposed to toxic process gases. NANOZ-powered tags detect AsH₃, PH₃, HF, SiH₄ instantly – with real-time alerts and GPS tracking.
Precision sensors for front-end fab, back-end packaging, and cleanroom HVAC
From front-end wafer processing to back-end packaging – precision at every step
5-Year TCO for a 50,000 WSPM fab (400 measurement points)
*Sensor life 2-5 years depending on environment. Cleanroom = ~4 years.